摘要：納米硅與納米氧化鋅復(fù)合材料的光學(xué)特性研究。用多孔硅襯底上生長(zhǎng)ZnO薄膜的方法來(lái)制備復(fù)合材料。首先用化學(xué)腐蝕法制備多孔硅襯底，制備過(guò)程中要注意溶液的濃度和腐蝕時(shí)間的控制。制成多孔硅后進(jìn)行形貌特征分析。然后采取了在多孔硅上旋涂膠體煅燒制成納米ZnO薄膜。用溶膠凝膠法以乙酸鋅為主要原料來(lái)配置制備ZnO的膠體。復(fù)合材料制成后研究它的光學(xué)特性，我們主要研究多孔硅上生長(zhǎng)ZnO薄膜的發(fā)射光譜。通過(guò)復(fù)合材料的發(fā)射發(fā)光光譜研究納米硅與納米氧化鋅復(fù)合材料的光學(xué)性能。

關(guān)鍵詞：多孔硅   溶膠凝膠   ZnO薄膜   發(fā)射光譜   復(fù)合材料   光學(xué)性能

Abstract:Optical properties of nanometer silicon with nano-zinc oxide composites research, Preparation of composite with ZnO thin films grown on porous silicon substrate. first, using chemical corrosion method to make the porous silicon substrate ,which pay attention to the concentration of the solution and corrosion control during preparation process. Then analyzing the morphology of the porous silicon . And then take a coating on a porous silicon body calcined made ??of nano - ZnO thin films. Zinc acetate as the main raw material for preparation of ZnO colloidal by sol-gel method . after that Studying the optical properties of composite materials.We mainly studied the emission spectrum of ZnO thin films grown on porous silicon.It researched optical properties of nano silicon and nano-zinc oxide composite materials by the emission spectrum spectrum of the composite material .

Keywords:   Porous silicon  Sol-gel  ZnO thin films   Emission spectrum   Composite materials   Optical properties