摘 要：

最近,由于BaTiO3/SrTiO3的特殊的物理性質(zhì)出現(xiàn)了很多關(guān)于薄膜的研究。相比較單相的BaTiO3或SrTiO3薄膜而言，BaTiO3/SrTiO3 的超晶格數(shù)[1]體現(xiàn)了它們不同的介電性能。特別是，BaTiO3/SrTiO3的超晶格數(shù)顯示出了一個(gè)相當(dāng)大的介電常數(shù)和非光學(xué)性質(zhì)也可以加以闡釋薄膜鐵電特性的來源。眾所周知，這些超晶格的性質(zhì)和每層薄膜的厚度以及界面的微觀結(jié)構(gòu)相關(guān)。

　　　但是直到現(xiàn)在為止,除了BaTiO3/SrTiO3的超晶格結(jié)構(gòu)引起了大家的廣泛關(guān)注外，還應(yīng)研究薄膜的表面粗糙度、薄膜厚度與薄膜濃度之間的關(guān)系。我們用溶膠凝膠法分別在玻璃和Si/SiO2/Ti/Pt襯底上制備了不同濃度的BaTiO3/SrTiO3薄膜，退火溫度為750℃。其物理性質(zhì)通過XRD、AFM、SEM 和反射率測(cè)試得到。這些測(cè)試結(jié)果顯示薄膜的峰高、表面粗糙度、薄膜的厚度以及薄膜最小反射率對(duì)應(yīng)的波長(zhǎng)都隨著BaTiO3/SrTiO3薄膜濃度的升高而上升。

關(guān)鍵詞：BaTiO3/SrTiO3薄膜，濃度，峰高，表面粗糙度，厚度，反射率。

Abstract：Recently, a number of studies have been focused on BaTiO3/SrTiO3 thin films because of their remarkable physical properties. BaTiO3/SrTiO3 superlattices show quite different dielectrics properties compared to single-phase films of BaTiO3 or SrTiO3. Particularly, BaTiO3/SrTiO3 superlattices show a dramatically large dielectric constant and large optical nonlinearity which clarify the origin of the remarkable ferroelectricity. It is well known that the properties of these superlattices are very sensitive to the thickness of each layer and the interface microstructures. 

　　Though, up to now, except that BaTiO3/SrTiO3 superlattice structures have been attracted much attention, there are also a few studies reported on the film roughness and thickness which relate to their density. We have prepared different density of BaTiO3/SrTiO3 thin films with multilayered structures deposited on glass and Si/SiO2/Ti/Pt substrates by a sol–gel deposition and heating at 750℃. The physical properties were obtained by XRD, SEM, AFM and reflectivity tests. The results show that the peak height, film roughness, thickness and the wavelength corresponding to the minimum reflectivity are increasing with the rising of the density of BaTiO3/SrTiO3 thin films.

Keywords: BaTiO3/SrTiO3 thin films, density, peak height, roughness, thickness, reflectivity.